Kinetic Simulation of Electron Drift Mechanics and Radical Yields in Fluoromethane Discharges

International Journal of Physics | Vol. 17, No. 2, February 2026 | pp. 9–16

DOI: 10.46882/2026/IJP/000190

Research Article

Title: Kinetic Simulation of Electron Drift Mechanics and Radical Yields in Fluoromethane Discharges

Names of Authors: A. M. El-Chemali¹, S. H. Zhang²

Authors’ Affiliations:
¹ Department of Physics, Faculty of Science, Lebanese University, Beirut, Lebanon
² Department of Physics, Tsinghua University, Beijing, China

Abstract: Fluoromethane (CH3F) gas discharges are widely utilized across the microelectronics manufacturing industries for precision dielectric oxide etching, chamber surface passivation, and thin-film texturing. This study develops a self-consistent kinetic simulation model to analyze electron drift mechanics and compute radical generation rates in low-pressure CH3F discharges. We solved the electron Boltzmann equation using a multi-term spherical harmonic expansion framework across an expansive reduced electric field range (E/N) spanning 10.0 Td to 600.0 Td. The model incorporates comprehensive cross-section sets detailing elastic collision momentum transfers, vibrational pumping thresholds, dissociative attachment, and electron-impact ionization tracks. Our calculations demonstrate that adding helium diluents (from 20.0% to 70.0% by volume) significantly distorts the high-energy tail of the electron energy distribution function. At a field strength of E/N = 60.0 Td, the total CH2F radical production rate coefficient scales up by an order of magnitude due to enhanced electron mean energies. The calculated electron drift velocities match independent swarm experimental tracks within a tight ±4.5% variance index, providing vital baseline constants for optimization.

Keywords: Fluoromethane; Boltzmann equation; electron transport; plasma kinetics; cross-section; dielectric etching

Manuscript Timeline: Received: November 02, 2025; Revised: December 18, 2025; Accepted: January 11, 2026; Published: February 13, 2026

Citation: El-Chemali, A. M., & Zhang, S. H. (2026). Kinetic Simulation of Electron Drift Mechanics and Radical Yields in Fluoromethane Discharges. International Journal of Physics, 17(2), 9–16.

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